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In MOSFET fabrication, the channel length is defined during the process of

1. (A) isolation oxide growth
2. (B) channel stop implantation
3. (C) poly-silicon gate patterning
4. (D) lithography step leading to the contact pads

Correct answer: (C) poly-silicon gate patterning

Solution

The channel length in MOSFET fabrication is determined during the poly-silicon gate patterning step, where the gate structure is defined and patterned, directly influencing the dimensions of the channel.

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